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有機金屬化學气相沉積法(MOCVD, Metal-organic Chemical Vapor Deposition)，是在基板上成長半導體薄膜的一種方法。 其他類似的名稱如：MOVPE (Metal-organic Vapor-Phase Epitaxy)、OMVPE (Organometallic Vapor-Phase Epitaxy)及OMCVD (Organometallic Chemical Vapor Deposition)等等，其中的前兩個字母"MO" 或 ...
其中的前兩個字母 "MO" 或是 "OM" ，指的是半導體薄膜成長過程中所採用的反應源 (precusor) 為金屬化合物 ... 反應源可以分成兩種，第一種是有機金屬反應源，第二種是氫化物氣體反應源。有機金屬反應源儲藏在一個具有兩個聯外管路的密封不鏽鋼 ...
Metalorganic vapour phase epitaxy (MOVPE), also known as organometallic vapour phase epitaxy (OMVPE) or metalorganic chemical vapour deposition (MOCVD), is a chemical vapour ...
Increase performance and quality with compact in situ tools for MOCVD. The kSA ICE metrology tool is small, compact, and easy to use.
Modern metal-organic chemical vapor deposition (MOCVD) systems have evolved to meet the demands for GaN-based light-emitting diodes (LEDs) and ...
Metal organic chemical vapor deposition (MOCVD) is a well-known, controllable synthesis method. It features in the all vapor phase reaction, which allows the ...
2008年12月9日 - Metal-organic chemical vapor deposition (MOCVD) has assumed a great deal of technological importance in the fabrication of a number of ...
Metal organic chemical vapor deposition (MOCVD) is a process used for creating high purity crystalline compound semiconducting thin films and micro/nano ...
2014年11月28日 - The MOCVD technique enables very thin layers of atoms to be deposited on a semiconductor wafer and is a key process for manufacturing III-V ...
2015年5月26日 - Metalorgenic Chemical Vapor Deposition (MOCVD) [Metalorganic Vapor Phase Epitaxy (MOVPE), OMCVD, OMVPE] One of the premier ...
